Because of the continued scaling of technology and supply-threshold voltage, leakage power has become more significant in power dissipation of nanoscale CMOS circuits. Therefore, estimating the total leakage power is critical to designing low-power digital circuits. In nanometer CMOS circuits, the main leakage components are the subthreshold, gate-tunneling, and reverse-biased junction band-to-band-tunneling (BTBT) leakage currents
