This paper proposes a new precise macro-modeling for leakage current in BSIM4 65nm technology considering subthreshold leakage, gate tunneling leakage, stack effect, and fanout effect. Using the accurate macro-model, a heuristic algorithm is developed to estimate the leakage power and generate input test pattern for minimum leakage. The algorithm applies to ISCAS85 benchmark circuits, and the results are compared with the results of Hspice. The experimental result shows that the leakage power estimation using our macro-model is within 5% difference when comparing to Hspice results
