A study of the structure and properties of sputtered heusler alloy thin films

Abstract

Heusler alloy (Cu2MnSn) thin films were deposited onto quartz substrates by the techniques of cathodic sputtering. X-ray flourescenece techniques of cathodic sputtering. X-ray flourescence techniques used to determine the chemical composition of the films indicated that the sputtering rates of all components of the allow were essentially the same and that the films were of the same composition as the cathode