Grewe, Adrian

Lenk, Leonhard

Sinzinger, Stefan

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   TU Ilmenau | Universitätsbibliothek | ilmedia, 2019 http://www.tu-ilmenau.de/ilmedia  Lenk, Leonhard; Grewe, Adrian; Sinzinger, Stefan: Multi-layer diffractive Alvarez-Lohmann lenses for polychromatic applications  Zuerst erschienen in: DGaO-Proceedings. - Erlangen-Nürnberg : Dt. Gesellschaft für angewandte Optik. -120 (2019), art. A21, 2 S. Erstveröffentlichung: 02.09.2019 ISSN: 1614-8436 URN: urn:nbn:de:0287-2019-A021-7 [Gesehen: 04.09.2019]  DGaO Proceedings 2019 – http://www.dgao-proceedings.de – ISSN: 1614-8436 – urn:nbn:de:0287-2019-XXXX-Y submitted: XX.XXX.2019       published: XX.XXX.2019 Multi-layer diffractive Alvarez-Lohmann Lenses for polychromatic applications Leonhard Lenk, Adrian Grewe, Stefan Sinzinger Institut für Mikro- und Nanotechnologien IMN MacroNano® Fachgebiet Technische Optik Technische Universität Ilmenau mailto:leonhard.lenk@tu-ilmenau.de The well-known Alvarez-Lohmann lenses allow a tuning of their focal length by lateral displacement of two phase elements. Diffractive variations provide the advantage of allowing the use of lithographic fabrication methods for replication. We investigate the possibility of enhancing their broadband efficiency by using the multi-layer method, already well known for non-tunable DOEs. 1 Introduction and motivation Alvarez-Lohmann lenses (ALLs) generate variable wavefronts by lateral displacement of two (or more) optical elements. This allows e.g. creating a lens with tuneable focal length. ALLs theoretically offer large aperture diameters, a compact setup and can be realized as refractive or diffractive optical ele-ments (DOEs). These features make them particu-larly interesting for imaging applications such as photographic zoom lenses [1]. We will focus on the diffractive variation, since these allow the fabrication via lithographic techniques and offer more degrees of freedom for their design. Especially in the most interesting case of rotationally tuned ALLs the ad-vantages of a diffractive  implementation have been shown clearly, e.g. in [2] [3] [4](Fig. 1). Since the strong wavelength dependence of the diffraction ef-ficiency causes stray light and thereby reduces the image quality, we investigate the possibility of im-proving the lenses’ behavior by applying the well-known method of multi-layer DOEs to ALLs.  Fig. 1 Phase-elements (left, centre) and resulting phase function (right) of a diffractive ALL tuned by rotation de-scribed e.g. in [3] 2 Multi-layer DOEs Diffraction efficiency is defined as the ratio of the in-tensity within the desired diffraction order to the total incident intensity at the DOE. Phase-DOEs with an-alogue relief structures theoretically offer diffraction efficiencies of 100%. The phase function of these DOEs is realized by a variation of the thickness ݀, generating different optical path lengths between parts of the wavefront at different locations of the DOE due to the difference between the refractive in-dices of the two materials n଴, nଵ. Therefore, the gen-erated phase function Φ୰ୣୱ(λ) strongly depends on the wavelength λ. This can be formulated as a prod-uct of a wavelength dependent factor Y(ߣ) and the phase function Φ for the design wavelength ߣ଴(1). Φ୰ୣୱ(λ) = −2πλ ∙[n଴(λ) − nଵ(λ)] ∙ d =݊଴(ߣ) − ݊ଵ(ߣ)݊଴(ߣ଴) − ݊ଵ(ߣ଴)∙ߣ଴ߣ ∙ Φ = Y(ߣ) ∙ Φ   (1) The deviation of the resulting phase function for general wavelengths compared with the ideal phase function for the design wavelength causes the dif-fraction efficiency to decrease dramatically (SiO2-air in Fig. 2). The aim of the multi-layer method, described e.g. in [5] [6], is to ideally keep Y(ߣ) = 1 over the desired wavelength range. This can be achieved by no longer structuring the interface between DOE mate-rial and air, but using the interface between two se-lected materials. Their dispersive behaviour needs to be selected such that the variation of the differ-ence between the refractive indices compensates for the variation of the wavelength itself (1).   Fig. 2 Theoretical diffraction efficiencies ߟ(ߣ) for a single DOE with analogue relief structures for different combina-tions of materials, calculated by: ߟ(ߣ) = ݏ݅݊ܿଶ[ߨܻ(ߣ) − ߨ] 3 Structure and possible materials of a multi-layer ALL To enhance the broadband efficiency of the ALL, each of the phase elements must be realized as a multi-layer DOE on its own. The resulting ALL will    DGaO-Proceedings 2019 – http://www.dgao-proceedings.de – ISSN: 1614-8436 – urn:nbn:de:0287-2019-A021-7submitted: 25.Jul.2019       published: 02.Sep.2019 DGaO Proceedings 2019 – http://www.dgao-proceedings.de – ISSN: 1614-8436 – urn:nbn:de:0287-2019-XXXX-Y submitted: XX.XXX.2019       published: XX.XXX.2019 still show the strong chromatic aberration typical for DOEs, only the intensities within the different foci will ideally be the same(Fig. 3).  Besides the usual material combination of classical DOEs, fused silica (SiO2) and air, Fig. 2 shows two examples of materials cho-sen according to the multi-layer method. The ad-vantage can be seen clearly. Since there already is much experience with this combination, the fused silica-PDMS variation will be investigated more closely. 4 Simulations It can be expected that the resulting diffraction effi-ciency for the multi-layer ALLs will differ from the theoretical efficiencies shown in Fig. 2. This is due to the quantization of the phase elements and the fact that the ALLs consist of two DOEs positioned one behind the other. To get an idea of the possible results, simulations are performed in Matlab. The first step is to simulate the resulting phase structure at different wavelengths, for different combinations of materials (Fig. 4). The deviation compared to the phase function at the design wavelength can be seen quite clearly. The second step is a FFT-based Fresnel propagation to the respective focal plane for a series of wavelengths. Fig. 5 shows the resulting intensity distributions, the advantage of the multi-layer element is obvious. To quantify the perfor-mance, the intensity-sum over the airy-disk of each ALL version was divided by the sum of the intensity within the airy disk for the case of Fraunhofer dif-fraction at the aperture. This effectively means a comparison with the diffraction limited behavior. Fig. 6 shows the resulting curves which are very close to the theoretical values derived for a single DOE with analogue relief structures. As expected the overall efficiency is lower than the theoretical values, due to the quantization and the propagation through two consecutive DOEs. However, the advantage of the material combination of SiO2 and PDMS is demon-strated clearly.  Fig. 4 The resulting phase functions for different wave-lengths and different combinations of materials  Fig. 5 The resulting intensity distributions in the respec-tive focal plane, orange circle marks the theoretical airy-disk  Fig. 6 Resulting efficiency curves 5 Conclusion The results of our investigations show the potential of applying the multi-layer method to ALLs to en-hance their performance in broadband applications such as in imaging systems. The next aim is to de-sign and fabricate prototypes for experimental anal-ysis of the simulations’ results. The main challenge will be the necessary etch-depth. Caused by the small difference of the refractive indices, for the combination of SiO2-PDMS this depth will be about 18,9 µm for a phase step of 2ߨ. Enhanced tech-niques for plasma etching enable such etching depths with excellent aspect ratio and surface qual-ity [7]. References [1] L. Lenk, B. Mitschunas, S. Sinzinger, “Zoom systems with tunable lenses and linear lens movements”, JEOS RP 15:9 (2019) [2] A.W. Lohmann, D.P. Paris, “Variable Fresnel zone pattern”, Appl. Opt. 6(9): 1567-1570 (1967) [3] S. Bernet., M. Ritsch-Marte, “Adjustable refractive power from diffractive Moiré elements”, Appl. Opt. 47: 3722–3730 (2008) [4] A. Grewe, S. Sinzinger, “Efficient Quantization of Tunable Helix Phase Plates”, Opt. Lett. 41: 4755-4758 (2016) [5] A. Imamura, T. Ishii for Olympus Optical Co., Ltd.: Diffractive Optical Element. United States Patent US5847877, 7. Sept. 1995 [6] B. H. Kleemann, M. Seeßelberg, J. Ruoff, “Design concepts for broadband high efficiency DOEs”, JEOS RP 3: 080151-0801516. (2008) [7] Ch. Weigel, “Fluorbasiertes Trockenätzen von Mikro-strukturen in Glas und Glaskeramik”, Dissertations-schrift, TU Ilmenau, 2019. Fig. 3 Basic sketch of a multi-layer ALL    DGaO-Proceedings 2019 – http://www.dgao-proceedings.de – ISSN: 1614-8436 – urn:nbn:de:0287-2019-A021-7submitted: 25.Jul.2019       published: 02.Sep.2019 

Multi-layer diffractive Alvarez-Lohmann lenses for polychromatic applications

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Multi-layer diffractive Alvarez-Lohmann lenses for polychromatic applications

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