Brandner, Juergen J.

Korvink, Jan G.

Morini, Gian Luca

Nicolay, Pascal

Rapp, Michael

Toto, Sofia

KITopen

sensorsCorrectionCorrection: Design and Simulation of a WirelessSAW–Pirani Sensor with Extended Rangeand SensitivitySofia Toto 1, Pascal Nicolay 2 , Gian Luca Morini 3 , Michael Rapp 1, Jan G. Korvink 1and Juergen J. Brandner 1,*1 Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1,76344 Eggenstein-Leopoldshafen, Germany2 Carinthia Institute for Smart Materials and Manufacturing Technologies (CiSMAT), Carinthia University ofApplied Sciences, 9524 Villach/St. Magdalen, Austria3 Dipartimento di Ingegneria Industriale, Alma Mater Studiorum Università di Bologna, Viale Risorgimento 2,I-40136 Bologna, Italy* Correspondence: juergen.brandner@kit.edu; Tel.: +49-721-608-23963Received: 26 June 2019; Accepted: 18 July 2019; Published: 23 July 2019The authors wish to make the following erratum to Reference [1]:The Table 2 below contained false reference numbers. The references were corrected. The correctedreferences are also available below.The authors would like to apologize for any inconvenience caused to the readers by these changes.Table 2. Detection principles and pressure ranges of micro-electro-mechanical system (MEMS)Pirani gauges.Researcher Type of Gauge Pressure Range (Pa)Van Herwaarden and Sarro, 1988 [9] Heated cantilever combined withthermopile 0.13–13,300Völklein and Schnelle, 1991 [10] Heated resistor combined withthermopile 0.13–10Piotto et al., 2016 [11] Heated resistor with thermopile 0.3–105Mastrangelo and Muller, 1991 [12] Microbridge 10–10,000Swart et al., 1994 [13] Microbridge 13–1.33 × 105Chae et al., 2004 [14] Microbridge 2.6–267Moelders et al., 2004 [15] Microbridge 1.33–133Doms et al., 2005 [16] Microbridge 100–105Stark et al., 2005 [17] Microbridge 1.33–106Mitchell et al., 2008 [18] Microbridge 1.33–105Khosraviani and Leung, 2009 [19] Microbridge 13.3–106Li et al., 2009 [20] Microbridge 10.6–26,665Jiang et al., 2010 [21] Microbridge 0.1–1,000Chen, 2012 [22] Microbridge 133–1.33 × 105Puers et al., 2002 [23] Microbridge 100–107Moutaouekkil et al., 2015 [24] Microbridge 1,000–105Sensors 2019, 19, 3243; doi:10.3390/s19143243 www.mdpi.com/journal/sensorsSensors 2019, 19, 3243 2 of 5Table 2. Cont.Researcher Type of Gauge Pressure Range (Pa)Mailly et al., 2009 [25] Microbridge 20–20,000Robinson et al., 1992 [26] Resistor on dielectric membrane 10–13,300Paul et al., 1994 [27] Resistor on dielectric membrane 100–105Weng and Shie, 1994 [5] Resistor on dielectric membrane 1.33 × 10−5–133Shie et al., 1995 [28] Resistor on dielectric membrane 13.3–1.33 × 107De Jong et al., 2003 [29] Resistor on dielectric membrane 10–20,000Zhang et al., 2006 [30] Resistor on dielectric membrane 10–105Völklein et al., 2013 [3] Resistor on dielectric membrane 1.33 × 10−4–1332Grau et al., 2014 [6] Resistor on dielectric membrane 0.13–105Xiao et al., 2011 [7] Resistor on dielectric membrane 1–1,000Takashima et al., 2008 [31] Resistor on dielectric membrane 0.002–105Jeon et al., 2016 [32] Resistor on dielectric membrane 0.013–105Paul and Baltes, 1995 [33] Resistor on dielectric membrane 100–106Wenzel and Bak, 1998 [34] Resistor on diaphragm 10–105Qiu et al., 2009 [35] Metallic wire 1–100Brun et al., 2012 [36] Silicon nanowire 50–105Ghouila-Houri et al., 2017 [37] Microwire 10,000–8 × 105Schelcher et al., 2011 [38] Ni-microbeam 3.3–105Wang et al., 2010 [39] Microplate 0.1–105Santagata et al., 2011 [40] Tube-shaped 0.133–1.33 × 105Mercier et al., 2012 [41] Cr/Au-resistor on LiNbO3-substrate(SAW device) 0.001–105Corrected references for Reference [1]1. 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Correction: Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

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Correction: Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

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