Accurate and fast two-step phase shifting algorithm based on principle component analysis and Lissajous ellipse fitting with random phase shift and no pre-filtering

Abstract

To achieve high measurement accuracy with less computational time-in-phase shifting interferometry, a random phase-shifting algorithm based on principal component analysis and Lissajous ellipse fitting (PCA& LEF) is proposed. It doesn't need pre-filtering and can obtain relatively accurate phase distribution with only two phase shifted interferograms and less computational time and is suitable for different background intensity, modulation amplitude distributions and noises. Moreover, it can obtain absolutely accurate result when the background intensity and modulation amplitude are perfect and can partly suppress the effect of imperfect background intensity and modulation amplitude. Last but not least, it removes the restriction that PCA needs more than three interferograms with welldistributed phase shifts to subtract relatively accurate mean. The simulations and experiments verify the correctness and feasibility of PCA& LEF. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing AgreementNational Natural Science Foundation of China (NSFC) [11304034]; Department of Science and Technology of Jilin Province [20190701018GH]; Education Department of Jilin Province [JJKH20190691KJ]; State Key Laboratory of Applied OpticsOpen access journalThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at [email protected]

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