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Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical components
Authors
T. Döhring
B. Heidemann
+10 more
Ulrich Heinzmann
K. Hilgers
U. Kleineberg
A. Kloidt
M. Pröpper
S. Rahn
B. Schmiedeskamp
H.J. Stock
T. Tappe
P. Varga
Publication date
1 January 1993
Publisher
HTU Druck
Abstract
Kloidt A, Stock HJ, Kleineberg U, et al. Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical components. In: Varga P, ed. Proceedings of Symposium on Surface Science 1993. Wien: HTU Druck; 1993: 115
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Last time updated on 05/09/2013
