Membrane-type Gas Sensor with Thick Film Sensing Layer: Optimization of Heat Loses

Abstract

We report the results of application of combined technology for the manufacturing of metal oxide gas sensors. This technology includes the manufacturing of micromachined thin dielectric membrane with microheater used as a support for thick film metal oxide gas sensing layer. The optimization of geometry of the membrane performed by means of finite-element computer simulation enabled the fabrication of methane gas sensor with power consumption of ~35 mWatt at optimal temperature equal to about 500°C. The microheater and the sensing layer have satisfactory long-term stability