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Anwendung des feinfokussierten Ionenstrahles zur Fertigung mikromechanischer Bauelemente
Authors
Lothar Bischoff
U. Breng
+4 more
T. Geßner
Evelyn Hesse
B. Löbner
Jochen Teichert
Publication date
1 January 1994
Publisher
Forschungszentrum Rossendorf
Abstract
Abstract is not available.
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HSSS - Hochschulschriftenserver der SLUB
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oai:qucosa:de:qucosa:22078
Last time updated on 05/11/2018
Qucosa
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oai:qucosa:de:qucosa:22078
Last time updated on 23/08/2018
Qucosa – Hemholtz-Zentrum Dresden-Rossendorf
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oai:qucosa:de:qucosa:22078
Last time updated on 03/09/2019
