Silicon bulk micromachining for sensor technologies

Abstract

Micromachining and related technologies are needed to develop a large variety of sensors and actuators, i.e. the basic components of Microsystems or MEMS (MicroElectroMechanical Systems) as they are also commonly called. Microsystems are designed and fabricated by integrating different micocomponents into one functional unit comprising of sensors, actuators, I.C.s for data processing etc. In this development a variety of micromachining technologies, ranging from the conventional silicon bulk and surface micromachining to LIGA and LASER techniques are employed, each one having specific merits for specific products. This review focuses on silicon bulk micromachining applied to the fabrication of sensors suitable for being integrated into Microsystems, which are under development at IRST Microsystem Division