Gate Oxide Quality Improvement Nearby Bird`s Beak Region

Abstract

To compare the use of dry (DW-) with respect to wet (conventional) LOCOS, investigation on the quality of the gate oxide grown nearby birdÕs beak region has been carried out. Results show that for DW samples a much higher QBD is obtained with respect to the conventional one. Furthermore, a dedicated test has pointed out a weak QB D dependence on the interstitial oxygen concentration of the silicon wafers