Resistive pressure sensing structures on polymide membranes on GaAs substrate

Abstract

This paper presents the manufacture of a simple pressure sensing structure supported on polymide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The sensing element shows high linearity, absence of hysteresis, good sensitivity, and can be used in high-temperature application