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特集9 : 研究速報 : Trends in Nanoscale Science and Technology : Characterization of Thin Film Mechanical Properties
Authors
Etienne Farnault
Hiroyuki Fujita
Moussa Hoummady
Takahisa Masuzawa
Publication date
1 December 1997
Publisher
2nd Department, Institute of Industrial Science, University of Tokyo 微細加工学
Abstract
小特集 マイクロマシ
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Last time updated on 05/09/2013