特集6 : 研究速報 : Some Problems Related to Detection of Displacement of an Object by a Tunneling Current

Abstract

Due to its very high sensitivity to tunneling distance, the tunneling current has the potential of being used for detecting small displacements. Moreover, the target with which the displacement is to be measured need only be a few nanometers or less in size, which makes the detection technique a strong candidate for application to displacement measurement of nano to micrometric objects. In this paper, I will report on an experiment carried out to measure the displacement of a conventional scanning force microscopy cantilever, with an aim of applying the technique to vibration excitation and detection of a nanometric oscillator.小特集 マイクロマシ