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A ZnO/SiO2/Si(100) Love mode transducer

Abstract

ZnO/SiO2/Si[100] Love mode transducers were fabricated. SiO2 films were deposited using electron beam evaporation. ZnO films were deposited using r.f. magnetron sputtering. ZnO and SiO2 films were examined by SEM and the performance of the transducers was examined by their acoustic response. The observation of the SAW Love mode delay line was performed under untuned conditions. Operating frequencies of the transducers were around 85 MHz

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