Conditions for depositing perovskite-oriented Pb0.92Sr0.08(Zr0.65Ti0.35) O-3 thin films on gold by RF magnetron sputtering are investigated. Deposition results were analysed by scanning electron microscopy, X-ray photoelectron spectroscopy and X-ray diffractometry. It was found that the desired perovskite phase can be obtained at a substrate temperature of 300 degrees C, much lower than the typically reported 650 degrees C for deposition on platinum
