Modeling, Filtering and Optimization for AFM Arrays

Abstract

We will present new tools and results developed for Arrays of Microsystems and especially for AFM array design.For modeling,we developed a two-scale model of cantilever arrays in elastodynamics.A robust optimization toolbox is interfaced to aid for design before fabrication.Two real-time computation methods for filtering and control of the coupled cantilevers are studied.One is based on functions of operators and the Cauchy integral formula.It may be realized with PNR.The second one relies to diffusive realization to be implemented in a FPGA.Displacement measurement is done by interferometry