UV-enhanced Ozone Sensing Response of Al-doped Zinc Oxide Nanocrystals at Room Temperature

Abstract

International audienceIn this work, we focus on ozone (O3) detection at room temperature in the main objective to be well suited for most of flexible substrates. Aluminum doped zinc oxide (AZO) nanoparticles were deposited in thin films to be used as ozone gas sensors. It was demonstrated that the nanoparticles had good sensitivity to O3 at low temperature ( 125°C) when the sensor was exposed to UV illumination. This study provides an easy and efficient way to obtain O3 gas sensors at temperature from 25°C up to 125°C by a simple and versatile solution-process. Electrical resistance measurements at 25°C under UV irradiation showed that AZO thin films were sensitive even at a low ozone concentration (35 ppb)