Influence of plasma exposure on physical characteristics of thin films of SnO2 obtained from SnCl4 solutions with additives of NH4F and NH4OH

Abstract

The electrical conductivity of tin dioxide is extremely sensitive to the state of the surface in the temperature range 300-800 K, at which oxidation-reduction reactions take place on its surface. Nanocrystalline films of tin dioxide are selectively sensitive to the presence of toxic gases, organic and certain biological molecules in the surrounding atmosphere [1]. SnO2-based films are also used as transparent conductive coatings [2]. To modify the properties of the films, alloying, heat treatment, plasma treatment is used