Performance of a Langmuir probe and a hairpin resonance probe in inductively coupled low pressure plasmas

Authors
Publication date
1 January 2007
Publisher

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    MPG.PuRe

    redirect
    oaioai:pure.mpg.de:item_2512701
    Last time updated on 15/06/2019