Few-femtosecond to attosecond electron pulses are required for advancing ultrafast diffraction and microscopy to the regime of electrons in motion. Here, we report the combination of a single-electron source with a microwave cavity for pulse compression. In such an arrangement, the electron pulses can become significantly shorter than the laser pulses used for electron generation. This comes at the expense of an increase in energy spread.We report the use of an energy analyzer for characterizing microwave-compressed singleelectron pulses. Phase effects, linearity, focal distances, incoming pulse durations and laser–microwave jitter are measured for three different synchronization approaches. The results demonstrate the applicability of a microwave cavity in the single-electron regime and identify jitter as the current limitation on the way to few-femtosecond, eventually attosecond pulses of single electrons.publishe
