The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates
by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at
room temperature have been studied. From Raman spectra it is found that the position of high-frequency
bands in vibrational spectra was located at 700-730 cm 1 or in the region of 830 850 cm 1 depending on
the deposition parameters whereas it is not exceed 630 cm 1 from TiAlN of NaCl structure. It is found the
two-phase structure of coatings: a small quantity of NaCl-type structure of TiAlN (TiN) and the disordered
structure of the chains of polyhedra [TiNx] with x = 5 and x = 4. The chains of polyhedra [TiNx] with x = 4
are mainly formed at large discharge power of Al(Ti) target or at small content of N2 gas.
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