The optimization process of the RF magnetron sputtered Al - doped ZnO (AZO) thin films was carried out by studying its structural, optical, electrical, and morphological
properties at different RF power and different working pressures for its use as a front-contact for the copper indium diselenide (CIS) based thin film solar cell. The structural study suggests that the preferred orientation of grains along the ( 002)
plane having a hexagonal structure of the grains. The optical and electrical properties suggest that the films show an average transmission of 85 % and a resistivity of the order of 10-4 Wcm. The morphology analysis suggests the formation of packed grains
having a homogeneous surface.
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