In the presented work, ZnO nanofiber sensor structures designed and fabricated 
using a standard microelectronic device technology were studied. The structures in the 
configuration of a resistor with chemically active ZnO multiple nanofibers deposited by 
electrospinning method were prepared. Investigation of inclusion in the process reactive-
ly sputtered AlN insulating film to improve the robustness of the nanofibres on the 
substrate was undertaken. Selective wet chemical etching of AlN film using photoresist 
developers and a photoresist mask to define the sensor active area was studied. The 
Ti/Au ohmic contacts were fabricated using the lift-off photolithography process. To-
pography of the sensor structure details was investigated using AFM. Electrical charac-
terization by means of I-V measurements was made. Sensitivity to the physiologically 
relevant concentration of Bovine Serum Albumin in water solution was shown.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/2058

Baranowska-Korczyc, A.

Boratynski, B.

Elbaum, D.

Fronc, K.

Paszkiewicz, R.

Ramiaczek-Krasowska, M.

Stafiniak, A.

Szyszka, A.

Tlaczala, M.

Electronic Sumy State University Institutional Repository

60                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I             NEW FABRICATION APPROACH to ZnO MULTIPLE NANOFIBER SENSORS Boguslaw Boratynski1*, Andrzej Stafiniak1, Adam Szyszka1,  Maria Ramiaczek-Krasowska1, Regina Paszkiewicz1, Marek Tlaczala1, An-na Baranowska-Korczyc2, Krzysztof Fronc2, Danek Elbaum2  1  Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Jan-iszewskiego 11/17, 50-372 Wroclaw, Poland 2 Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 02-668 Warsaw, Poland  ABSTRACT In the presented work, ZnO nanofiber sensor structures designed and fabricated using a standard microelectronic device technology were studied. The structures in the configuration of a resistor with chemically active ZnO multiple nanofibers deposited by electrospinning method were prepared. Investigation of inclusion in the process reactive-ly sputtered AlN insulating film to improve the robustness of the nanofibres on the substrate was undertaken. Selective wet chemical etching of AlN film using photoresist developers and a photoresist mask to define the sensor active area was studied. The Ti/Au ohmic contacts were fabricated using the lift-off photolithography process. To-pography of the sensor structure details was investigated using AFM. Electrical charac-terization by means of I-V measurements was made. Sensitivity to the physiologically relevant concentration of Bovine Serum Albumin in water solution was shown.   Key words: ZnO nanofibres,  AlN film coating, biosensor  INTRODUCTION ZnO nanofibres (NFs), as quasi one-dimensional semiconductor nanostructures, due to high surface-to-volume ratio reveal improvement of crucial sensors parameters as sensitivity and response times. ZnO NFs could be of special interest in biomedical applications due to their relatively low biologi-cal toxicity [1]. The electrospinning method of ZnO nanofibres fabrication provides relative simplicity of their positioning on a chosen substrate [2, 3]. Additionally, such deposited nanofibers are characterized by a highly devel-oped surface induced by the nanocrystalline structure. On the other hand, a main disadvantage of the electrospinning method is a relatively weak adhesion of the NFs to the substrate after the necessary calcinations process, as well as instability and vulnerability to acid and alkaline solutions. These properties impose limitations on the use of standard electronic device manufacturing tech-niques such as preparation of substrates, photolithography and the lift-off pro-                                               * e-mail: boguslaw.boratynski@pwr.wroc.pl, tel: (+48)71355 9795 Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   61  cess for contact metallization and passivation of the device which results in incompatibility of the electrospun ZnO NFs and the Si processing. Although the ZnO based nanostructures have been reported as gas and optical sensors [4, 5], their fragility in water environments requires additional chemical treatment for their commercial biosensors applications. Detection of either biological molecules concentrations and activities in physiological fluids or water contain-ing tissue is of fundamental importance in life sciences and medical diagnos-tics. This led us to the study of applicability of mass production manufacturing techniques in ZnO nanofiber sensor fabrication, based on large area substrates and pattern definition obtained by photolithographic methods resulting in high yield and low manufacturing cost. In the present work, design and fabrication of ZnO multiple nanofiber sensor structures using a standard microelectronic device technology were studied. The structures with chemically active electrospun ZnO nanofibers were prepared. Two innovative fabrication steps, were proposed. Firstly, an insulat-ing film of reactively sputtered AlN was applied on the nanofibers surface to protect the NFs against the reactants in further processing. Secondly, selective wet chemical etching of AlN film and ZnO NFs through a photoresist mask to define the active sensor area was performed using photoresist developers. The structures in the configuration of a resistor were prepared with the Ti/Au ohmic contacts fabricated using the lift-off photolithography process. Electrical char-acterization of fabricated structures by means of I-V measurements was made. Sensitivity to the physiologically relevant concentration of Bovine Serum Al-bumin (BSA) in aqueous solution was tested. BSA, due to its native adsorption properties, was selected to demonstrate the role of the protein’s charged amino acids on the ZnO surface charge and therefore on its conductance. METHODS OF STRUCTURE FABRICATION AND ANALYSIS ZnO nanofibres were deposited on 10 x 10 mm2 thermally oxidized Si substrates by electrospinning method. The precursor containing 0.25 g of zinc acetate dehydrate (Zn(CH3COO)2 • 2H2O) in 1.25 g solution of 10% polyvinyl alcohol (PVA, MW = 72 000) was placed in a syringe and then a constant flow rate through a syringe pump was established to obtain multiple fiber deposition at high electric potential difference of 10 kV between the syringe tip and the substrate. The fibers were formed in ambient temperature 22°C and humidity of 40%.  Finally,  the  process  of  calcinations  at  700°C  for  4h  in  oxygen  ambient  was performed. After calcinations, the fibers showed wurtzite structure of na-nometer size crystallites with average diameter from 5 nm to 30 nm [6]. The diameter of a single NF averaged at 300nm. Such prepared NFs sensor sub-strates were coated with a dielectric layer of AlN by pulsed DC reactive magne-tron sputtering in Ar/N2 (6N) gaseous atmosphere using Al target. The pro-cessing  was  done  at  total  pressure  of  5×10-2 mbar with no substrate heating. 62                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I             The thickness of the AlN layer was of the order of a typical thickness of a ZnO nanofiber, i.e. in the range from 200 nm to 400 nm. To improve the NFs coat-ing, multiple processing of AlN sputtering could be performed, especially in the case of thicker or cross-linked nanofibres. Then, a lift-off photolithography technique was used to pattern photoresist (AZ 4110) and define the area for contact electrodes. The next important step, was a precise etching of AlN layer exposed in the photoresist openings. It was done in the solution of Microposit 351 developer diluted in H2O (1:5). Appro-priately controlled photoresist opening step allowed fabrication of the ohmic contacts made of Ti/Au (50/1000 Å) evaporated in a UHV system. To protect the contacts, a layer of a photosensitive polyimide was deposited by a spin-on method and a photolithography process was used to define the active region of the sensor. The active region in between the contacts had a length of 80ȝm and a width of 5mm. In the final processing step the ZnO nanofibers in the active region were gradually exposed by carefully selected process of etching AlN layer also in a solution of photoresist developer. Control of the process was possible by observing change of the substrate interference colors by means of an optical microscope.  To study structure and morphology of such fabricated NFs samples AFM and optical microscope were used. Details of the active region of the NFs sen-sor are shown in Fig. 1.   a)   b) Fig. 1 - Details of the ZnO NFs sensor active region:  a) an opening patterned in the etched AlN (green) showing the SiO2 substrate (violet) with NFs on it; b) an AFM view of an edge of the active region with a polyimide layer protecting the contacts  The structures were investigated using AFM to evaluate the coating ap-plicability of the AlN film for good coating and covering the ZnO NFs. Stand-ard point probe measurements were performed to check the stability of the ohmic contacts and to find I-V characteristics in different environments. To test sensing properties of the sensor structures commercially available Bovine Se-Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   63  rum Albumin (Calbiochem product, 99.0 %, pH: 7.1) was used. The BSA solu-tion was prepared from lyophilized powder of BSA (99%) with concentration of 10 mg/ml in DI water. RESULTS AND DISCUSSION Fig.  2 presents AFM images of the ZnO nanofibers after depositon and calcinations at 700ºC on SiO2/Si substrate. The images were taken before and after covering the NFs with the protective AlN sputtered film. The topography image and phase images are shown with the latter of special importance, since the phase image represents component contrast of the investigated surface.   a) c)  b)  d) Fig. 2 – Topography (a) and phase (b)  AFM images of  a ZnO NF on SiO2 substrate without AlN coating;  topography (c) and phase (d)  AFM images of  a ZnO NF on SiO2 substrate covered by 200nm sputtered AlN film. Scan area 5ȝm x 5ȝm  It is seen that the ZnO NF after coating with AlN film has much smoother surface (fig2c.)  in  comparison  to  the  state  before  coating  (fig.2a). The phase images shown in fig.2b and fig.2d give information about changes of the com-position of the scanned surface. On this basis we could believe, that after AlN 64                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I             processing the NF is almost completely covered with AlN, since a very little shadowing was visible.  The I-V measurements have shown stability and linearity of the Ti/Au ohmic  contacts  to  the  ZnO  NFs.  Fig.  3 demonstrates response of the sensor device to air, pure (10Mohmcm) deionized (DI) water and a BSA water solu-tion. The BSA solution was prepared from lyophilized powder of BSA (99%) with concentration of 10 mg/ml in DI water.   Fig. 3 – The I-V characteristics of the ZnO NFs sensor structure measured in various environments: air ambient, DI water, BSA 10mg/ml DI water solution  Rise of current (conductivity) in the water environment, according to a well known mechanism is attributed to decrease of the NF surface depletion layer due to removal of adsorbed oxygen atoms[7]. In case of impact of BSA molecules on the current rise several factors have been postulated, e.g. adsorp-tion of ionized atoms present on the biomolecule surface may change the con-ductance of ZnO nanofibers by altering the surface charge [8]. CONCLUSIONS We developed and tested ZnO multiple nanofiber sensor structures for bi-ological application with a robust design applicable to the standard microelec-tronic device processing which include reactively sputtered AlN dielectric film, the lift-off photolithography and a polyimide passivation layer. Application of insulated AlN layer resulted in more reliable positioning of ZnO nanofibers on Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   65  the substrate. On the other hand, selective etching of the AlN layer did not hamper the sensing capabilities of the ZnO nanofibers. The structures have shown expected I-V characteristics and responsivity to physiologically relevant BSA concentrations in aqueous solution.  Acknowledgements This work was co-financed by European Union within European Regional Development Fund, through grant Innovative Economy (POIG.01.01.02-00-008/08), National Centre for Science under the grant no. N N515 495740, N N518424036 by Wroclaw University of Technology statutory grants (S10019, B10010) and Slovak-Polish International Cooperation Program no. SK-PL-0017-09.  REFERENCES [1] S. Roy, Z. Gao, Nano Today, 2009, 4, P. 318-334 [2] A. Theron, E. Zussman, A.L. Yarin, Nanotechnology, 2001, Vol.12, P. 384–390 [3] D. Li, G. Ouyang, J.T. McCann, Y. Xia, Nano Letters, 2005, Vol.5, No.5, P. 913-916 [4] A.B. Djursic, M.C. Ng and X.Y. Chen, Progress in Quantum Electronics, 2010, Vol.34, P. 191-259 [5] J. Huang and Q. Wan, Sensors, 2009, 9, P. 9903-24 [6] A. Baranowska-Korczyc, B. Sikora , W. Zaleszczyk, A. Nowicka, K. Fronc, T. Wojciechowski, P. Dziawa, W. Knoff, K. Gas, W. Paszkowicz, W. Szuszkiewicz, K. Swiatek, L. Klopotowski, K. Sobczak, P. Dluzewski, G. Karczewski, T. Wojtowicz, J. Bujak and D. Elbaum, ICFSI-12 in Weimar, 2009, Abstract-book, P. 302 [7] G. Shen and D. Chen, Recent Patents on Nanotechnology, 2010, 4, P. 20-31 [8] Y. Cui Y, Q. Wei Q, H. Park H and C.M. Lieber, Science, 2001, 293, P. 1289-92 

New fabrication approach to ZnO multiple nanofiber sensors

SocioEconomic Challenges Journal (Sumy State University)

60                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I            
 
NEW FABRICATION APPROACH to ZnO MULTIPLE 
NANOFIBER SENSORS 
Boguslaw Boratynski1*, Andrzej Stafiniak1, Adam Szyszka1,  
Maria Ramiaczek-Krasowska1, Regina Paszkiewicz1, Marek Tlaczala1, An-
na Baranowska-Korczyc2, Krzysztof Fronc2, Danek Elbaum2 
 
1  Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Jan-
iszewskiego 11/17, 50-372 Wroclaw, Poland 
2 Institute of Physics, Polish Academy of Sciences, al. Lotnikow 32/46, 
02-668 Warsaw, Poland 
 
ABSTRACT 
In the presented work, ZnO nanofiber sensor structures designed and fabricated 
using a standard microelectronic device technology were studied. The structures in the 
configuration of a resistor with chemically active ZnO multiple nanofibers deposited by 
electrospinning method were prepared. Investigation of inclusion in the process reactive-
ly sputtered AlN insulating film to improve the robustness of the nanofibres on the 
substrate was undertaken. Selective wet chemical etching of AlN film using photoresist 
developers and a photoresist mask to define the sensor active area was studied. The 
Ti/Au ohmic contacts were fabricated using the lift-off photolithography process. To-
pography of the sensor structure details was investigated using AFM. Electrical charac-
terization by means of I-V measurements was made. Sensitivity to the physiologically 
relevant concentration of Bovine Serum Albumin in water solution was shown.  
 
Key words: ZnO nanofibres,  AlN film coating, biosensor 
 
INTRODUCTION 
ZnO nanofibres (NFs), as quasi one-dimensional semiconductor 
nanostructures, due to high surface-to-volume ratio reveal improvement of 
crucial sensors parameters as sensitivity and response times. ZnO NFs could be 
of special interest in biomedical applications due to their relatively low biologi-
cal toxicity [1]. The electrospinning method of ZnO nanofibres fabrication 
provides relative simplicity of their positioning on a chosen substrate [2, 3]. 
Additionally, such deposited nanofibers are characterized by a highly devel-
oped surface induced by the nanocrystalline structure. On the other hand, a 
main disadvantage of the electrospinning method is a relatively weak adhesion 
of the NFs to the substrate after the necessary calcinations process, as well as 
instability and vulnerability to acid and alkaline solutions. These properties 
impose limitations on the use of standard electronic device manufacturing tech-
niques such as preparation of substrates, photolithography and the lift-off pro-
                                               
* e-mail: boguslaw.boratynski@pwr.wroc.pl, tel: (+48)71355 9795 
Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   61 
 
cess for contact metallization and passivation of the device which results in 
incompatibility of the electrospun ZnO NFs and the Si processing. Although 
the ZnO based nanostructures have been reported as gas and optical sensors [4, 
5], their fragility in water environments requires additional chemical treatment 
for their commercial biosensors applications. Detection of either biological 
molecules concentrations and activities in physiological fluids or water contain-
ing tissue is of fundamental importance in life sciences and medical diagnos-
tics. This led us to the study of applicability of mass production manufacturing 
techniques in ZnO nanofiber sensor fabrication, based on large area substrates 
and pattern definition obtained by photolithographic methods resulting in high 
yield and low manufacturing cost. 
In the present work, design and fabrication of ZnO multiple nanofiber 
sensor structures using a standard microelectronic device technology were 
studied. The structures with chemically active electrospun ZnO nanofibers were 
prepared. Two innovative fabrication steps, were proposed. Firstly, an insulat-
ing film of reactively sputtered AlN was applied on the nanofibers surface to 
protect the NFs against the reactants in further processing. Secondly, selective 
wet chemical etching of AlN film and ZnO NFs through a photoresist mask to 
define the active sensor area was performed using photoresist developers. The 
structures in the configuration of a resistor were prepared with the Ti/Au ohmic 
contacts fabricated using the lift-off photolithography process. Electrical char-
acterization of fabricated structures by means of I-V measurements was made. 
Sensitivity to the physiologically relevant concentration of Bovine Serum Al-
bumin (BSA) in aqueous solution was tested. BSA, due to its native adsorption 
properties, was selected to demonstrate the role of the protein’s charged amino 
acids on the ZnO surface charge and therefore on its conductance. 
METHODS OF STRUCTURE FABRICATION AND ANALYSIS 
ZnO nanofibres were deposited on 10 x 10 mm2 thermally oxidized Si 
substrates by electrospinning method. The precursor containing 0.25 g of zinc 
acetate dehydrate (Zn(CH3COO)2 • 2H2O) in 1.25 g solution of 10% polyvinyl 
alcohol (PVA, MW = 72 000) was placed in a syringe and then a constant flow 
rate through a syringe pump was established to obtain multiple fiber deposition 
at high electric potential difference of 10 kV between the syringe tip and the 
substrate. The fibers were formed in ambient temperature 22°C and humidity of 
40%.  Finally,  the  process  of  calcinations  at  700°C  for  4h  in  oxygen  ambient  
was performed. After calcinations, the fibers showed wurtzite structure of na-
nometer size crystallites with average diameter from 5 nm to 30 nm [6]. The 
diameter of a single NF averaged at 300nm. Such prepared NFs sensor sub-
strates were coated with a dielectric layer of AlN by pulsed DC reactive magne-
tron sputtering in Ar/N2 (6N) gaseous atmosphere using Al target. The pro-
cessing  was  done  at  total  pressure  of  5×10-2 mbar with no substrate heating. 
62                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I            
 
The thickness of the AlN layer was of the order of a typical thickness of a ZnO 
nanofiber, i.e. in the range from 200 nm to 400 nm. To improve the NFs coat-
ing, multiple processing of AlN sputtering could be performed, especially in the 
case of thicker or cross-linked nanofibres. 
Then, a lift-off photolithography technique was used to pattern photoresist 
(AZ 4110) and define the area for contact electrodes. The next important step, 
was a precise etching of AlN layer exposed in the photoresist openings. It was 
done in the solution of Microposit 351 developer diluted in H2O (1:5). Appro-
priately controlled photoresist opening step allowed fabrication of the ohmic 
contacts made of Ti/Au (50/1000 Å) evaporated in a UHV system. To protect 
the contacts, a layer of a photosensitive polyimide was deposited by a spin-on 
method and a photolithography process was used to define the active region of 
the sensor. The active region in between the contacts had a length of 80?m and 
a width of 5mm. In the final processing step the ZnO nanofibers in the active 
region were gradually exposed by carefully selected process of etching AlN 
layer also in a solution of photoresist developer. Control of the process was 
possible by observing change of the substrate interference colors by means of 
an optical microscope.  
To study structure and morphology of such fabricated NFs samples AFM 
and optical microscope were used. Details of the active region of the NFs sen-
sor are shown in Fig. 1. 
 
 
a) 
 
 
b) 
Fig. 1 - Details of the ZnO NFs sensor active region:  a) an opening patterned in 
the etched AlN (green) showing the SiO2 substrate (violet) with NFs on it; b) an AFM 
view of an edge of the active region with a polyimide layer protecting the contacts 
 
The structures were investigated using AFM to evaluate the coating ap-
plicability of the AlN film for good coating and covering the ZnO NFs. Stand-
ard point probe measurements were performed to check the stability of the 
ohmic contacts and to find I-V characteristics in different environments. To test 
sensing properties of the sensor structures commercially available Bovine Se-
Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   63 
 
rum Albumin (Calbiochem product, 99.0 %, pH: 7.1) was used. The BSA solu-
tion was prepared from lyophilized powder of BSA (99%) with concentration 
of 10 mg/ml in DI water. 
RESULTS AND DISCUSSION 
Fig.  2 presents AFM images of the ZnO nanofibers after depositon and 
calcinations at 700ºC on SiO2/Si substrate. The images were taken before and 
after covering the NFs with the protective AlN sputtered film. The topography 
image and phase images are shown with the latter of special importance, since 
the phase image represents component contrast of the investigated surface.  
 
a)
 
c)
 
 
b) 
 
d) 
Fig. 2 – Topography (a) and phase (b)  AFM images of  a ZnO NF on SiO2 substrate 
without AlN coating;  topography (c) and phase (d)  AFM images of  a ZnO NF on 
SiO2 substrate covered by 200nm sputtered AlN film. Scan area 5?m x 5?m 
 
It is seen that the ZnO NF after coating with AlN film has much smoother 
surface (fig2c.)  in  comparison  to  the  state  before  coating  (fig.2a). The phase 
images shown in fig.2b and fig.2d give information about changes of the com-
position of the scanned surface. On this basis we could believe, that after AlN 
64                   Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I            
 
processing the NF is almost completely covered with AlN, since a very little 
shadowing was visible.  
The I-V measurements have shown stability and linearity of the Ti/Au 
ohmic  contacts  to  the  ZnO  NFs.  Fig.  3 demonstrates response of the sensor 
device to air, pure (10Mohmcm) deionized (DI) water and a BSA water solu-
tion. The BSA solution was prepared from lyophilized powder of BSA (99%) 
with concentration of 10 mg/ml in DI water. 
 
 
Fig. 3 – The I-V characteristics of the ZnO NFs sensor structure measured in various 
environments: air ambient, DI water, BSA 10mg/ml DI water solution 
 
Rise of current (conductivity) in the water environment, according to a 
well known mechanism is attributed to decrease of the NF surface depletion 
layer due to removal of adsorbed oxygen atoms[7]. In case of impact of BSA 
molecules on the current rise several factors have been postulated, e.g. adsorp-
tion of ionized atoms present on the biomolecule surface may change the con-
ductance of ZnO nanofibers by altering the surface charge [8]. 
CONCLUSIONS 
We developed and tested ZnO multiple nanofiber sensor structures for bi-
ological application with a robust design applicable to the standard microelec-
tronic device processing which include reactively sputtered AlN dielectric film, 
the lift-off photolithography and a polyimide passivation layer. Application of 
insulated AlN layer resulted in more reliable positioning of ZnO nanofibers on 
Nanomaterials: Applications and Properties (NAP-2011). Vol. 2, Part I                   65 
 
the substrate. On the other hand, selective etching of the AlN layer did not 
hamper the sensing capabilities of the ZnO nanofibers. The structures have 
shown expected I-V characteristics and responsivity to physiologically relevant 
BSA concentrations in aqueous solution. 
 
Acknowledgements 
This work was co-financed by European Union within European Regional 
Development Fund, through grant Innovative Economy (POIG.01.01.02-00-
008/08), National Centre for Science under the grant no. N N515 495740, N 
N518424036 by Wroclaw University of Technology statutory grants (S10019, 
B10010) and Slovak-Polish International Cooperation Program no. SK-PL-
0017-09. 
 
REFERENCES 
[1] S. Roy, Z. Gao, Nano Today, 2009, 4, P. 318-334 
[2] A. Theron, E. Zussman, A.L. Yarin, Nanotechnology, 2001, Vol.12, P. 384–390 
[3] D. Li, G. Ouyang, J.T. McCann, Y. Xia, Nano Letters, 2005, Vol.5, No.5, P. 913-
916 
[4] A.B. Djursic, M.C. Ng and X.Y. Chen, Progress in Quantum Electronics, 2010, 
Vol.34, P. 191-259 
[5] J. Huang and Q. Wan, Sensors, 2009, 9, P. 9903-24 
[6] A. Baranowska-Korczyc, B. Sikora , W. Zaleszczyk, A. Nowicka, K. Fronc, 
T. Wojciechowski, P. Dziawa, W. Knoff, K. Gas, W. Paszkowicz, W. Szuszkiewicz, 
K. Swiatek, L. Klopotowski, K. Sobczak, P. Dluzewski, G. Karczewski, 
T. Wojtowicz, J. Bujak and D. Elbaum, ICFSI-12 in Weimar, 2009, Abstract-book, 
P. 302 
[7] G. Shen and D. Chen, Recent Patents on Nanotechnology, 2010, 4, P. 20-31 
[8] Y. Cui Y, Q. Wei Q, H. Park H and C.M. Lieber, Science, 2001, 293, P. 1289-92 


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New fabrication approach to ZnO multiple nanofiber sensors

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