In the presented work, ZnO nanofiber sensor structures designed and fabricated
using a standard microelectronic device technology were studied. The structures in the
configuration of a resistor with chemically active ZnO multiple nanofibers deposited by
electrospinning method were prepared. Investigation of inclusion in the process reactive-
ly sputtered AlN insulating film to improve the robustness of the nanofibres on the
substrate was undertaken. Selective wet chemical etching of AlN film using photoresist
developers and a photoresist mask to define the sensor active area was studied. The
Ti/Au ohmic contacts were fabricated using the lift-off photolithography process. To-
pography of the sensor structure details was investigated using AFM. Electrical charac-
terization by means of I-V measurements was made. Sensitivity to the physiologically
relevant concentration of Bovine Serum Albumin in water solution was shown.
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