The technique of research of energy spectra of the secondary ion emission is offered. The scheme of experimental installation to carry out a research in a wide range of energies of a primary ions beam (20-150 keV) is described. The installation is mounted on base of a high dose ion implanter. For the analysis of secondary ions on weights and energy a monopole mass-spectrometer MX7304A, equipped with a small-sized energy filter, is used. The energy spectra of monoatomic and cluster ions of copper, and also singly and doubly-charged ions of aluminum are received.
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