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Pattern Dependency of Pure-Boron-Layer Chemical-Vapor Depositions (abstract)
Authors
W.B. (author) De Boer
V. (author) Mohammadi
L.K. (author) Nanver
T.L.M. (author) Scholtes
Publication date
6 May 2012
Publisher
'The Electrochemical Society'
Abstract
MicroelectronicsElectrical Engineering, Mathematics and Computer Scienc
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Last time updated on 09/03/2017
TU Delft Repository
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Last time updated on 22/08/2013
