Ge-on-Si: Single-Crystal Selective Epitaxial Growth in a CVD reactor (abstract)

Authors
Publication date
7 October 2012
Publisher
'The Electrochemical Society'

Abstract

MicroelectronicsElectrical Engineering, Mathematics and Computer Scienc

    Similar works

    Full text

    thumbnail-image

    Available Versions

    TU Delft Repository

    redirect
    oaioai:tudelft.nl:uuid:316fb92b-3...
    Last time updated on 22/08/2013

    NARCIS

    redirect
    Last time updated on 09/03/2017