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Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP
Authors
C.F. (author) Carlström
F. (author) Karouta
+4 more
H.W.M. (author) Salemink
E. (author) Van der Drift
R. (author) Van Der Heijden
R.W. (author) Van Der Heijden
Publication date
1 January 2006
Publisher
Abstract
Kavli Institute of Nanoscience DelftApplied Science
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NARCIS
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Last time updated on 09/03/2017
TU Delft Repository
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oai:tudelft.nl:uuid:d4e84b9a-9...
Last time updated on 22/08/2013
