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Micro-transformateur piézoélectrique intégré sur substrat en silicium
Authors
Eric Cattan
François Costa
+3 more
Patrick Sangouard
Emmanuel Sarraute
Dejan Vasic
Publication date
1 January 2004
Publisher
HAL CCSD
Abstract
International audienc
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Hal-Diderot
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oai:HAL:hal-00811665v1
Last time updated on 14/04/2021
HAL - UPEC / UPEM
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oai:HAL:hal-00811665v1
Last time updated on 07/05/2019
