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Kinetics and mechanism of tungsten LPCVD using tungsten hexafluoride and silane studied by in-situ growth rate measurements
Authors
J.A.M. (author) Ammerlaan
J. (author) Schoonman
P.J. (author) Van der Put
Publication date
1 January 1993
Publisher
Abstract
Abstract is not available.
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NARCIS
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Last time updated on 09/03/2017
TU Delft Repository
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Last time updated on 22/08/2013
