A comprehensive electron energy-loss spectroscopy (EELS) study of stoichiometric niobium oxides and niobium was performed in a transmission electron microscope. Numerous EELS features were identified allowing the distinction of different Nb-oxidation states. Optimized sensitivity factors were determined for accurate quantification of the Nb-O system which were applied to nanoscale analysis of solid-electrolyte capacitors with Nb anodes and anodically grown niobium-oxide layers as dielectric
