Scanning tunnelling microscopy (STM) was used to investigate the nucleation and growth of palladium clusters on two different, ultrathin, epitaxial, titania films grown on a Pt3Ti(111) surface. The first oxide phase, z\u27-TiOχ, is anisotropic and consists of parallel stripes separated by trenches. Defects (i.e., oxygen vacancies) in this structure are confined to these trenches and act as nucleation sites. Therefore, the Pd clusters are mostly arranged in unidirectional rows along the trenches, creating a template effect. The second phase, w\u27-TiOχ, exhibits a hexagonal, long range, (7 × 7)R21.8°, Moiré-type superstructure with fewer and shallower defects, making the template effect less discernible