Frandsen, Lars Hagedorn

Denne ph.d. afhandling beskæftiger sig med modelleringen, fabrikationen og karakteriseringen af fotoniske båndgabs komponenter, som er realiseret i et silicium-på-isolator materiale. Metoderne "plane-wave expansion theory" og "finite-difference time-domain modelling" er blevet anvendt til at modellere den fotoniske krystal bølgeleder og demonstrerer, hvordan dens egenskaber kan ændres med henblik på det operationelle bølgelængde område, udbredelsestabet, samt dispersions egenskaber. Den inverse design metode topologi optimering er blevet anvendt på fotoniske krystaller og er blevet demonstreret til at være et kraftfuldt værktøj til at optimere bredbånds egenskaberne for forskellige passive nanofotoniske komponenter. Fabrikationen af fotoniske krystaller er dækket i detaljer for udnyttelsen af elektron-stråle litografi og reaktiv ion ætsning. Fotoniske krystal strukturer, som er korrigeret for elektron-sprednings effekter og med sub-20 nm detaljer, er blevet realiseret med succes og ætset med en meget høj kvalitet og stejle sidevægs profiler i silicium. Endvidere, er nanoimprint litografi blevet demonstreret til at være en attraktiv kandidat til den litografiske del i en masseproduktion af nanofotoniske kredsløb. Afhandlingen præsenterer en masse eksperimentielle resultater fra fabrikerede fotoniske krystal komponenter det være inklusiv forskellige typer bølgeleder bøj, T- og Y-fordelere, bølgelængde afhængige filtre, forbedrede koblings-overgange, og bølgeledere med langsomt lys. Resultaterne øger interessen for anvendelsen af fotoniske båndsgabs komponenter i nanofotoniske kredsløb om det være for simpel lysledning, lysdeling, og lysfiltrering eller for udnyttelsen af langsomt lys i ikke-lineære effekter eller til dispersions kompensation.This ph.d. thesis deals with the modelling, fabrication and characterization of photonic bandgap components realized in silicon-on-insulator material. Plane-wave expansion theory and finite-difference time-domain modelling are applied to the photonic crystal waveguide and demonstrate how the fundamental properties of such may be altered in terms of the operational wavelength range, the propagation loss, and the dispersion properties. The inverse design method topology optimization of broadband performance for different passive nanophotonic components. the fabrication of photonic crystals is covered in detail for the utilization of electronic beam lithography and reactive ion etching. photonic crystal structures corrected for proximity effects and with sub-20 nm features are successfully realized and etched with high fidelities and steep wall frofiles into silicon moreover, nanoimprint lithography is demonstrated to be an attractive candidate for the lithographic step in the mass-production of nanophotonic circuits. The thesis presents numerous experimental results on fabricated photonic crystal components including various waveguide bends, T- and Y-splitters, wavelength dependent filters, improved butt-coupling, and slow-light waveguides the results promote the interest of applying photonic bandgap components in nanophotonic circutis that being for simple guiding, splitting, and multiplexing of light or for the utilization of the slow-light phenomenon for non-linear effects or dispersion compensatin

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Fabrication and Characterization of Photonic Bandgap Components

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Fabrication and Characterization of Photonic Bandgap Components

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