Antico, Andrea

Hansen, Hans Nørgaard

Lucchetta, Giovanni

Marinello, Francesco

Tosello, Guido

Atomic Force Microscopy (AFM) is a powerful technique providing 3D surface topographies with very high resolution in both lateral and vertical direction. Thanks to its relatively easy use, AFM can be well introduced in process control, gaining great advantage in research as well as in the evaluation of final product characteristics. The paper considers quantitative application of AFM measurements for industrial applications. In particular the influence and subsequent optimization of scanning parameters on the precision of AFM maps is discussed, with particular attention to scan speed and interaction force when measuring a one-dimensional grating with triangular profile. The aim is then maximization of information from collected data and minimization of measurement variability and scan time. Optimized scan setting is then applied to measure surface defects of micro injection moulded components. Results show the detrimental effect of high speed on the measurement of deep valleys as well as the effect of force on vertical measurements accuracy. Horizontal measurements were also performed, highlighting the prevailing effect of scan speed

Influence of measuring parameters on the accuracy of atomic force microscope in industrial applications

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