Madsen, Jan

Menon, Aric Kumaran

Shafique, Mohammad

Virk, Kashif M.

Crossref

System-Level Modeling and Simulation of MEMS-based Sensors

The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible. In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer

Online Research Database In Technology

System-Level Modelling and Simulation of MEMS-Based Sensors

http://orbit.dtu.dk/ws/files/4097972/Madsen.pdf

System-Level Modelling and Simulation of MEMS-Based Sensors

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Crossref

Online Research Database In Technology