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Active damping of the scanner for high-speed atomic force microscopy
Authors
Ando Toshio
Kodera Noriyuki
Yamashita Hayato
Publication date
1 May 2005
Publisher
'AIP Publishing'
Doi
Cite
Abstract
金沢大学大学院自然科学研究科物理学金沢大学理学部The scanner that moves the sample stage in three dimensions is a crucial device that limits the imaging rate of atomic force microscopy. This limitation derives mainly from the resonant vibrations of the scanner in the z direction (the most frequent scanning direction). Resonance originates in the scanner\u27s mechanical structure as well as in the z piezoactuator itself. We previously demonstrated that the resonance originating in the structure can be minimized by a counterbalancing method. Here we report that the latter resonance from the actuator can be eliminated by an active damping method, with the result the bandwidth of the z scanner nearly reaches the first resonant frequency (150 kHz) of the z piezoactuator. © 2005 American Institute of Physics
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Last time updated on 06/05/2019