Department of Earth Sciences, Faculty of Science, Kanazawa UniversityDepartment of Earth Sciences, Faculty of Science, Kanazawa UniversityDepartment of Earth Sciences, Faculty of Science, Kanazawa UniversityDepartment of Earth Sciences, Faculty of Science, Kanazawa UniversityDepartment of Earth Sciences, Faculty of Science, Kanazawa UniversityDepartment of Earth Sciences, Faculty of Science, Kanazawa UniversityThe solution introduction ICP-MS technique for trace element analysis of rock samples was constructed at Kanazawa University. Trace element concentrations of geological standards (JB-2, JP-1, JA-1, and JGB-2) and Avacha peridotite xenoliths, Russia, which are strongly depleted in major elements and the hardest matter for analysis, were determined by the ICP-MS equipment. The values of concentration of middle to heavy masses (Rb-U) in geological standards coincide with those reported by other studies with ICP-MS techniques. The reproducibility is within 5% of differences of values of Rb to Hf in JB-2 in response to the changes in dates, dilutions and calibration methods. In the case of peridotites (low trace elements concentrations in the order of ppb to sub-ppb), relative standard deviations and relative differences among the runs under the various conditions are larger than in basalt with trace element concentrations in the order of ppm. Especially, large relative standard deviations (>10s%) for alkaline elements (Li, Rb, Cs), HFSE (Zr, Nb, Ta), Pb and Bi are shown in the refractory Avacha peridotite xenoliths with trace element concentrations in the order of sub-ppb. The solution introduction ICP-MS technique is a powerful tool for a precise insight into trace element characteristics of rocks of wide chemical compositions