'Institute of Electrical and Electronics Engineers (IEEE)'
Abstract
金沢大学工学部Atmospheric pressure plasma in pre-mixed Ar/H2 flow was generated by pulse-modulation method. The coil length of the inductively-coupled plasma (ICP) torch was extremely large. The source side power was 30 kW before pulsation, and thus the plasma power had around 25.6 kW considering 85% matching efficiency
