Photon source

Abstract

A photon source is described comprising a plasma source with at least one cathode and at least one anode, between which a system of one or more mutually sepd. cascade plates is placed, which cascade plates are provided with at least one passage opening, wherein corresponding passage openings of successive cascade plates lie at least substantially mutually in line, with at least one gas inlet for admitting at least during operation a gas to be excited at an inlet pressure and with an outlet opening close to the anode for allowing exit of photons emitted by a generated plasma, wherein an elec. power source is connected at least during operation between the cathode and the anode, characterized in that the power source is able and adapted to generate a modulated current and that, at least during operation, the gas inlet is coupled to gas supply means which are able and adapted to admit the gas to be excited at a modulated, sub-atm. to above-atm. inlet pressure. [on SciFinder (R)