High power and high capacity 3D-structured TiO2 electrodes for Lithium-Ion microbatteries

Abstract

An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was\u3cbr/\u3edemonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor\u3cbr/\u3edeposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film\u3cbr/\u3eelectrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity\u3cbr/\u3eof a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power\u3cbr/\u3eand cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly\u3cbr/\u3estructured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density