ALD, ALE and 2D Materials:atomic scale processing for optoelectronics applications

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Publication date
1 January 2017
Publisher
Optical Society of America (OSA)

Abstract

\u3cp\u3eMany applications are seeing a trend towards miniaturization and utilization of nanoscale effects. In this presentation atomic-scale processing techniques offered by Oxford Instruments will be discussed and possible benefits for optoelectronics applications are highlighted.\u3c/p\u3

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