Geer, SB Bas  van der

Haaf, G Gijs  ten

Luiten, OJ Jom

Mutsaers, PHA Peter

Rens, JFM Jasper  van

Vredenbregt, EJD Edgar

Wouters, SHW Steinar

Wouters, S.H.W.

ten Haaf, G.

van Rens, J.F.M.

van der Geer, S.B.

Luiten, O.J.

Mutsaers, P.H.A.

Vredenbregt, E.J.D.

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 High-resolution Focussed Ion Beam by laser cooling andcompression of a thermal atomic beamCitation for published version (APA):Wouters, S. H. W., ten Haaf, G., van Rens, J. F. M., van der Geer, S. B., Luiten, O. J., Mutsaers, P. H. A., &Vredenbregt, E. J. D. (2014). High-resolution Focussed Ion Beam by laser cooling and compression of a thermalatomic beam. In Proceedings of the 46th Conference of the European Group on Atomic Systems (EGAS), 1-4July 2014, Lille, France (Europhysics conference abstracts; Vol. 38D). European Physical Society (EPS).Document status and date:Published: 01/01/2014Document Version:Publisher’s PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can beimportant differences between the submitted version and the official published version of record. Peopleinterested in the research are advised to contact the author for the final version of the publication, or visit theDOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and pagenumbers.Link to publicationGeneral rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright ownersand it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.            • Users may download and print one copy of any publication from the public portal for the purpose of private study or research.            • You may not further distribute the material or use it for any profit-making activity or commercial gain            • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the “Taverne” license above, pleasefollow below link for the End User Agreement:www.tue.nl/taverneTake down policyIf you believe that this document breaches copyright please contact us at:openaccess@tue.nlproviding details and we will investigate your claim.Download date: 05. Oct. 2023High-resolution Focussed Ion Beam by laser cooling andcompression of a thermal atomic beamS.H.W. Wouters1, G. ten Haaf1, J.F.M. van Rens1, S.B. van der Geer1,2, O.J. Luiten1, P.H.A. Mutsaers1,and E.J.D. Vredenbregt11Coherence and Quantum Technology group, Department of Applied Physics,Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, Netherlands2Pulsar Physics, www.pulsar.nlPresenting Author: s.h.w.wouters@tue.nlIn order to improve the resolution of nano-fabrication using Focused Ion Beams (FIBs)we are developing an ultra-cold ion source based on photo-ionization of a laser-intensifiedatomic beam. Initial calculations have shown that an ion beam with a brightness of 107A/m2 sr eV and a longitudinal energy spread of less than 1 eV can be achieved at acurrent up to 10 pA. Combined with high performance focusing optics, this would lead toa nanometer-sized spot at which sample manipulation can be performed.The starting point is a high-flux atom source which consists of a Knudsen cell connectedto a collimating tube. The brightness of the atomic beam is increased by laser cooling andcompression in the transverse direction by means of a magneto-optical compressor. Theresulting cold beam of atoms is photo-ionized inside an electric field to suppress disorder-induced heating caused by the non-uniform Coulomb interactions between the ions. Theion beam is then focussed to a nanometer-sized spot by means of a an electrostatic lenscolumn.Numerical calculations have been performed on the magneto-optical compressor inorder to find an optimal set of parameters. These reveal that a length of only 60 mm issufficient for cooling and compressing the atomic beam to a brightness higher than 107A/m2 sr eV at an equivalent flux up to 1 nA. Furthermore, a model was set up to describethe effect of both the disorder-induced heating of the ions and of the lens aberrations onthe final spot size. This was verified using particle tracking simulations incorporating arealistic ionization and acceleration structure. It was shown that spot sizes smaller than 1nm can be achieved at currents up to a few pA or 5 nm at currents up to 20 pA which isbetter than the state of the art Liquid Metal Ion Source based FIBs.We will report on simulations and on the experimental realization of the high-fluxKnudsen cell with collimation tube and the magneto-optical compressor.Knudsen cell CollimationLaser cooling& compressionPhoto-ionization FocussingIon source ≈ 40 cm Lens column ≈ 80 cmEFigure 1: Schematic drawing of the Atomic Beam Laser-cooled Ion Source.References

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High-resolution Focussed Ion Beam by laser cooling and compression of a thermal atomic beam

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High-resolution Focussed Ion Beam by laser cooling and compression of a thermal atomic beam

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