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Strategy for tuning the average charge state of metal ions incident at the growing film during HIPIMS deposition
Authors
Anders
Baragiola
+23Â more
G. Greczynski
Greczynski
Greczynski
Greczynski
Greczynski
Greczynski
Greczynski
Greczynski
Greczynski
Gudmundsson
I. Petrov
J.E. Greene
Kouznetsov
L. Hultman
Lieberman
Matsunami
Petrov
Petrov
Rejoub
Sigmund
Thompson
Thornton
Westwood
Publication date
Publisher
'Elsevier BV'
Doi
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info:doi/10.1016%2Fj.vacuum.20...
Last time updated on 01/04/2019