Geometrical Effects on the Dynamical Behavior of MEMS structures

Abstract

peer reviewedThe influence of geometrical dimensions on the dynamical behavior of polysilicon MEMS structures configurations is studied and presented in this paper. Electrostatically actuated MEMS components as microbridges and microcantilevers are used to investigate the coupled electro-mechanic effect, frequency responses and the dynamic bending stress. The electrostatic principle is common in sensing and acting devices and there are many MEMS structures subjected to electrostatic forces.Project MOMIVA