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Experimental analysis of the surface roughness evolution of etched glass for micro/nanofluidic devices
Authors
B Ganapathysubramanian
Bhushan B
+8Â more
Ghosh J K
Hao P F
J Ren
Prentner S Allen D M Larcombe L Marson S Jenkins K Saumer M
Ren J Ganapathysubramanian B Olsen M Sundararajan S
S Sundararajan
Thomas T R
Zhang X L
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'IOP Publishing'
Doi
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info:doi/10.1088%2F0960-1317%2...
Last time updated on 28/02/2019
