A proof-of-concept for a new and entirely CMOS compatible tunable nanobeam cavity is demonstrated in this paper. Preliminary results show that a compact nanobeam cavity (~20 μm^2) with high Q-factor (~50,000) and integrated with a micro-heater atop, is able of tuning the resonant wavelength up to 15 nm with low power consumption (0.35nm/mW), and of attaining high modulation depth with only ~100 μW. Additionally, a tunable bi-stable behavior is reported
