Refractive index sensing is a highly sensitive and label-free detection
method for molecular binding events. Commercial implementations of biosensing
concepts based on plasmon resonances typically require significant external
instrumentation such as microscopes and spectrometers. Few concepts exist that
are based on direct integration of plasmonic nanostructures with optoelectronic
devices for on-chip integration. Here, we present a CMOS-compatible refractive
index sensor consisting of a Ge heterostructure PIN diode in combination with a
plasmonic nanohole array structured directly into the diode Al contact
metallization. In our devices, the photocurrent can be used to detect surface
refractive index changes under simple top illumination and without the aid of
signal amplification circuitry. Our devices exhibit large sensitivities > 1000
nm per refractive index unit in bulk refractive index sensing and could serve
as prototypes to leverage the cost-effectiveness of the CMOS platform for
ultra-compact, low-cost biosensors.Comment: 21 pages, 6 figures, supporting information with 11 pages and 11
figures attache