ECOUTER conceptual schema-second order constructs. Description of data: Output of second order data analysis (DOCX 13Â kb

Madeleine Murtagh (3480887)

Joel Minion (3904528)

Andrew Turner (68479)

Rebecca Wilson (3904525)

Mwenza Blell (3904540)

Cynthia Ochieng (3904534)

Barnaby Murtagh (3904543)

Stephanie Roberts (3904537)

Oliver Butters (3904531)

Paul Burton (288048)

arXiv

Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators

Piredda, Giovanni

Stroj, Sandra

Ziss, Dorian

Stangl, Julian

Trotta, Rinaldo

Martín-Sánchez, Javier

Rastelli, Armando

Archivio della ricerca- Università di Roma La Sapienza

English

Micro-machining of PMN-PT Crystals with Ultrashort Laser Pulses

Piredda, G.

Stroj, S.

Ziss, D.

Stangl, J.

Trotta, R.

Martín Sánchez, Javier

Rastelli, A.

Repositorio Institucional de la Universidad de Oviedo

Martín-Sánchez, Javier

Repositorio Institucional de Asturias

Micromachining of PMN-PT Crystals with Ultrashort Laser Pulses

Martin-Sanchez, Javier

Online Publication Server University of Applied Science Vorarlberg

Micro-machining of PMN-PT crystals with ultrashort laser pulses