Characteristics of indium tin oxide films deposited by bias magnetron sputtering
- Publication date
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- Elsevier
Abstract
Indium tin oxide coatings have been deposited on glass substrates with substrate bias as a process parameter along with substrate temperature. It was found that films deposited with substrate heating and/or substrate bias were polycrystalline in nature and predominantly (400) oriented. The results are correlated to microstructural variation due to the process parameters. Films with lowest sheet resistance, 7.6 ohm/sq and electron concentration of 8.1Γ1021cmβ3 have been achieved in case of films deposited at 370oC with a substrate bias of + 18