Influence of steering effects on strain detection in AlGaInN/GaN heterostructures by ion channellin

Abstract

Ion steering effects in the interface of heterostructures can strongly influence the shape and position of angular channelling scans leading to considerable error in the determination of strain by ion channelling. As an example, this paper presents channelling measurements on a near-lattice-matched AlGaInN/GaN heterostructure which show no shift between the angular scans from the quaternary layer and the underlying GaN substrate although high resolution x-ray diffraction data confirm the presence of strain in the layer. Such ‘anomalous’ behaviour was studied by means of Monte Carlo simulations for nitride ternary and quaternary films in the whole composition range. The simulations show that the thickness, magnitude of the distortion of the strained lattice and energy of the probing beam are critical parameters controlling the impact of steering. Three composition/strain regions were established for a typical beam of 2MeV alpha particles corresponding to different intensities of the steering potential and in which strain measurements by ion channelling are (a) correct, (b) possible but require corrections and (c) not possible due to steering effects